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EPI / MOCVD
The operating company Xycarb Ceramics, plays a leading role in the development and manufacture of silicon carbide coated susceptors (barrel and single-wafer) for epitaxial processes. The coatings help to extend susceptor lifetime, improve process uptimes and cut cost of ownership. Xycarb Ceramics’ capabilities encompass a broad range of CVD coatings. These include aluminium nitride, used as a fluorine-etch resistant coating for single-wafer CVD applications, and tantalum carbide for very high-temperature applications. The operating company Schunk Kohlenstofftechnik also has extensive capabilities in the application of silicon carbide, pyrolytic carbon and boron carbide coatings.
A crucial quality-determining factor of a product, the coating, enhances the properties of the substrate material and makes the products better tailored for applications in the semiconductor industry.
Schunk Semiconductor is also playing a leading role in the development of next generation susceptor kits for wafer-processing equipment. A key tool in developing better products, our pre-production computer simulations provide in-depth information on coating properties, enabling us to manufacture very thin, stress- and temperature-optimized parts to extremely close tolerances.
For the highest product purity, all our coated products are manufactured in clean rooms with purity monitoring and analysis methods that include SEM, EDAX, XRD and GDMS.
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